Cross-sectional Kelvin probe force microscopy on III–V epitaxial multilayer stacks: challenges and perspectives

• Mattia da Lisca,
• José Alvarez,
• James P. Connolly,
• Nicolas Vaissiere,
• Karim Mekhazni,
• Jean Decobert and
• Jean-Paul Kleider

Beilstein J. Nanotechnol. 2023, 14, 725–737, doi:10.3762/bjnano.14.59

• photogenerated carrier distributions. The analysis of the KPFM data was assisted by means of theoretical modelling simulating the energy bands profile and KPFM measurements. Keywords: FM-KPFM; frequency-modulated Kelvin probe force microscopy; III–V multilayer stack; Kelvin probe modelling; KP modelling; SPV

• a study about the capability of cross-sectional KPFM for the study of a III–V multilayer stack under ambient conditions. In particular, we have investigated an InP/GaInAs(P) multilayer structure with layers of different widths and doping concentrations. The first objective of this analysis is the